| Material:
| High purity optical grade monocrystalline Kyropoulos Al2O3
|
| Orientation:
| C-axis [0001] ± 0.1° or any off-orientation ±0.1° towards M-axis or A-axis
|
| Diameter:
| 76.2 ± 0.05 mm
|
| Thickness:
| 330 or 430 or 480 ± 25 um
|
| TTV:
| < 10 um
|
| Bow:
| < 10 um
|
| Front Surface:
| Epi-polished
|
| Backside:
Or:
| Fine ground
Optically polished
|
| Flatness:
| < 10 um
|
| Surface Roughness (Ra):
| < 0.2 nm
|
| Orientation Flat:
| 22 mm ± 0.5 mm
|
| Primary Flat Location:
Or:
| A-axis [11-20] ± 0.3°
M-axis [10-10] ± 0.3°
|
| Secondary Flat (on request):
| 90° counterclockwise to Primary flat
|
| Package:
| Single wafer pack or 25 wafers EMPAK Ultrapack cassette
|
